Vacuum Sputtering Patents
BoardTek has long invested in R&D and innovation for vacuum sputtering equipment, delivering high-efficiency, low-energy, stable and reliable thin-film process solutions. To strengthen our technology lead, we prioritize patent strategy from the earliest design stage, continuing to invest in R&D and to file domestic and international patents on key technologies such as target-transport systems, chamber-structure optimization, film-uniformity control and automated monitoring modules. We have obtained dozens of invention and utility-model patents covering equipment design, process control and smart operating interfaces, building a complete technology protection network.
Through a comprehensive patent portfolio, we ensure the market competitiveness of our proprietary technology and provide customers with forward-looking, sustainable solutions. Going forward, we will continue to deepen integrated application of patented technology, advancing vacuum sputtering equipment toward intelligent and green operation, partnering with the industry to create a higher-value process era.
| Patent Category | Patents Granted | Pending |
|---|---|---|
| Equipment | 1 Invention Patent 16 Utility Model Patents |
1 Utility Model |
| Product | 15 Invention Patents 4 Utility Model Patents |
2 Utility Models |















